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  • GT-Chiller
    Right temperature without fail！

    EXCELLNT Corporation is a customer-centered company. The company remains China owned and operated. The original focus of the company was to utilize temperature control technology as the basis for its chillers and heat exchangers because our system provide reliable and precise temperature control in a integrated package.

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  • Excellent Corporation
    Specialize in chiller technology!

    The essence of thermostat system is can provide accurate and stable temperature environment. We have own standard accuracy ±0.01℃ temperature source.

  • Excellent Corporation

    We engineers thermal management solutions for the semiconductor,accelerator, laser, medical and biopharmaceutical.

Technology

Our exceptionally reliable thermoelectric compact and compressor based chillers provide stability performance that enable better results.

Our Company
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Semiconductor Chiller Production

Customers choose our chiller for its compact size, super energy-saving, precise temperature control and reliability. Our chiller heats and cools. You can choose from a wide range of options or we will develop a custom configuration.

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Semiconductor Chiller Service

Our team has manufactured and serviced chillers and heat exchangers for over 30 years. Our service department takes great pride in rapid high quality repairs, which are a necessity to high technology industry.

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Technology

The essence of thermostat system is can provide accurate and stable temperature environment. We have own standard accuracy ±0.01℃ temperature source

Some of our products

GT-C3060
Water cooled dual chiller. For LAM and Applied 8“/12" Etcher use

GT-C3060

Dual Chiller

GT-20GS
Water cooled single chiller.Multiple interfaces selectable (LAM-Analog,LonWorks;AMAT-CHX,Devicenet)

GT-20GS

Single Chiller

GT-MD10，Low temperature
Dual chiller for Endura® 5500 Copper process.

Low temperature to -40℃

Low temperature dual chiller

GT-R60D; Single Channel heat exchanger +30℃~110℃
Multiple interfaces selectable (AMAT0,AMAT1,AMAT-CHX,Devicenet) for Thin Film use.

GT-R60D

Single Heatexchanger