Products

Customers choose our chiller for its compact size, super energy-saving, precise temperature control and reliability. Our chiller heats and cools. You can choose from a wide range of options or we will develop a custom configuration for you.

GT-C3060
Water cooled dual chiller. For LAM and Applied 8“/12" Etcher use

GT-C3060

Dual channel chiller

GT-C2020
Water cooled dual chiller. For TEL 8“/12" Etcher use

GT-C2020

Dual channel chiller

GT-MD10
Low temperature to -40℃ Dual chiller for Endura 5500 Copper process.

GT-MD10

Dual channl chiller

GT-20GS
Water cooled single chiller.Multiple interfaces selectable(LAM-Analog,LonWorks;AMAT-CHX,Devicenet)

GT-20GS

Single channel chiller

GT-C20KW
Designed to meet Producer SE Specifications for replace MX500

GT-C20KW

Single channel big cooling capacity chiller

GT-F20DS
Air cooled single channel chiller for implantation.

GT-F20DS

Air cooled single channel chiller

GT-R60D; Single Channel heat exchanger +30℃~110℃
Multiple interfaces selectable (AMAT0,AMAT1,AMAT-CHX,Devicenet) for Thin Film use.

GT-R60D

Single channel Heat exchanger

GT-S40KD
4 loops 30~90℃ heat exchanger.
GT-S40KD is designed to meet OEM TF tool specifications. Multiple interfaces selectable (AMAT-CHX,Devicenet)

GT-S40KD

Single channel, 4 loops, big heat exchange capacity

GT-S30KD4；
Designed to meet 200mm Endura^® - 5500VHP specifications.Heat exchanger for replace SystemⅢ.

GT-S30KD4

travel

GT-S80
Air cooled uitra low temperature chiller. For Prober and Tester use

GT-S80

Ultra low temperature chiller

Under construction...

EXCELLNT

Coming soon

Under construction...

EXCELLNT

Coming soon