Chiller产品

GT-C3060
Water cooled dual chiller. For LAM and Applied 8“/12" Etcher use

GT-MD10
Low temperature to -40℃ Dual chiller for Endura 5500 Copper process.

GT-S40KD
4 loops 30~90℃ heat exchanger.
GT-S40KD is designed to meet OEM TF tool specifications. Multiple interfaces selectable (AMAT-CHX,Devicenet)

GT-S80
Air cooled uitra low temperature chiller. For Prober and Tester use

Under construction...